A test vehicle and a two step procedure to evaluate a massive number of single-walled carbon nanotube field effect transistors

Author

Martin-Fernandez, I. ; Sansa, M. ; Perez-Murano, F. ; Godignon, P. ; Lora-Tamayo, E.

Author_Institution

Inst. de Microelectron. de Barcelona (IMB-CNM-CSIC), Cerdanyola del Valles, Spain

fYear

2010

fDate

22-25 March 2010

Firstpage

48

Lastpage

51

Abstract

We present an automatic testing procedure to evaluate massive amounts of CNT-FETs that have been fabricated as a test vehicle. The procedure has been used to evaluate almost 140,000 CNT-FET devices that had been batch fabricated in a 4 inch wafer. The possibility of using data obtained from the automatic testing to achieve statistical analyses on device fabrication and on device electric characteristic is also analyzed.

Keywords

carbon nanotubes; field effect transistors; semiconductor device testing; statistical analysis; CNT-FET device; automatic testing; batch fabrication; device electric characteristic; device fabrication; single-walled carbon nanotube field effect transistor; statistical analysis; test vehicle; Automatic testing; CMOS technology; CNTFETs; Carbon nanotubes; Circuit testing; Electrodes; FETs; Fabrication; Statistical analysis; Vehicles; Batch fabrication; CNT-FET; carbon nanotube transistors; testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectronic Test Structures (ICMTS), 2010 IEEE International Conference on

Conference_Location

Hiroshima

Print_ISBN

978-1-4244-6912-3

Electronic_ISBN

978-1-4244-6914-7

Type

conf

DOI

10.1109/ICMTS.2010.5466860

Filename

5466860