DocumentCode
2386983
Title
On line diagnostics and support as a key part of process module control
Author
Locy, Michael
Author_Institution
KLA-Tencor, San Jose, CA, USA
fYear
2000
fDate
2000
Firstpage
229
Lastpage
232
Abstract
A new method of service delivery in the semiconductor industry is required. Current equipment support implementations fail to address the requirements of the industry for both the equipment supplier and the semiconductor manufacturer. This work examines the development, impact, and direction of "e-diagnostics" as a viable, if not necessary, method of support delivery.
Keywords
integrated circuit manufacture; integrated circuit testing; process control; IC manufacture; e-diagnostics; equipment supplier; equipment support implementations; on line diagnostics; process module control; semiconductor industry; semiconductor manufacturer; service delivery; support delivery; Costs; Electronics industry; Integrated circuit modeling; Manufacturing industries; Process control; Product safety; Production facilities; Safety devices; Semiconductor device manufacture; Virtual manufacturing;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing, 2000. Proceedings of ISSM 2000. The Ninth International Symposium on
ISSN
1523-553X
Print_ISBN
0-7803-7392-8
Type
conf
DOI
10.1109/ISSM.2000.993655
Filename
993655
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