Design and Simulation of Piezoresistive Micro Accelerometers for Wearable Sensing Applications

Author

Amarasinghe, Ranjith ; Inaba, Kiyeshi ; Dau, Van Thanh ; Dao, Dzung Viet ; Sugiyama, Susumu

Author_Institution

Ritsumeikan Univ., Shiga

fYear

2008

fDate

6-9 Nov. 2008

Firstpage

37

Lastpage

41

Abstract

This paper presents the modeling and simulation of new structure for solid-state three degrees of freedom (3-DOF) micro accelerometer utilizing piezoresistive effect in single crystal Si. The proposed sensor can detect three components of linear acceleration simultaneously. The sensing structure consists of combined cross-beam and surrounding beams and seismic mass. Therefore, this novel proposed sensor is showing good performance than other miniaturized sensor structures reported thus far.

Keywords

accelerometers; microsensors; piezoresistive devices; silicon; linear acceleration; piezoresistive effect; piezoresistive micro accelerometer; seismic mass; solid-state three degrees of freedom micro accelerometer; wearable sensing application; Acceleration; Accelerometers; Biomedical monitoring; Bridge circuits; Electromechanical sensors; Mechanical sensors; Piezoresistance; Piezoresistive devices; Solid modeling; Solid state circuits;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro-NanoMechatronics and Human Science, 2008. MHS 2008. International Symposium on

Conference_Location

Nagoya

Print_ISBN

978-1-4244-2918-9

Electronic_ISBN

978-1-4244-2919-6

Type

conf

DOI

10.1109/MHS.2008.4752419

Filename

4752419