Multilayered relaxor ferroelectric poly(vinylidene fluoride-trifluoroethylene-clorotrifluoroethylene) actuators to operate a varifocal liquid-filled microlens

We designed and fabricated the multilayered P(VDF-TrFE-CTFE) actuators, which can be operated by the applied voltage of only 40 V. To fabricate P(VDF-TrFE-CTFE) films having a thickness of about 1~2 μm, we also developed a new film transfer method, with which the P(VDF-TrFE-CTFE) films of about 1.5 μm thickness were fabricated and stacked. The deflection of the fabricated P(VDF-TrFE-CTFE) actuator was measured as a function of applied voltage, showing that with the applied voltage of 40 V the varifocal lens can change the optical power of more than 50 diopters. The response time of the actuator was also measured to be less than 20 ms. Therefore, we showed that the multilayered P(VDF-TrFE-CTFE) actuators can be used to operate the varifocal liquid-filled microlens to realize the auto-focus function in mobile phone cameras.