DocumentCode
2393706
Title
Pulsed laser processing: novel approach as to fabricate fully isolated transistors for VLSIs
Author
Ladygin, Eugene A. ; Usenko, Alexander Y.
fYear
1994
fDate
28 Aug-2 Sep 1994
Firstpage
321
Lastpage
321
Keywords
Electrons; Fabrication; Fiber lasers; Integrated circuit technology; Laser ablation; Laser theory; Optical films; Optical pulses; Semiconductor lasers; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Europe, 1994 Conference on
Print_ISBN
0-7803-1789-0
Type
conf
DOI
10.1109/CLEOE.1994.636560
Filename
636560
Link To Document