• DocumentCode
    2394395
  • Title

    Carbon nanotube technologies for future ULSIs

  • Author

    Awano, Yuji ; Yokoyama, Naoki

  • Author_Institution
    Nanotechnol. Res. Center, Fujistu Labs. Ltd., Atsugi, Japan
  • fYear
    2003
  • fDate
    6-8 Oct. 2003
  • Firstpage
    40
  • Lastpage
    41
  • Abstract
    In this paper, we discuss CNT technologies for future ULSIs, in particular, CNT via interconnects and CNT-FET technologies, including single electron transistors.
  • Keywords
    ULSI; carbon nanotubes; current density; field effect transistors; integrated circuit interconnections; nanotechnology; single electron transistors; C; FET; ULSI; carbon nanotube; interconnects; single electron transistors; Ballistic transport; Carbon nanotubes; Conducting materials; Current density; Nanotechnology; Ohmic contacts; Temperature; Thermal conductivity; Transconductance; Ultra large scale integration;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    VLSI Technology, Systems, and Applications, 2003 International Symposium on
  • ISSN
    1524-766X
  • Print_ISBN
    0-7803-7765-6
  • Type

    conf

  • DOI
    10.1109/VTSA.2003.1252546
  • Filename
    1252546
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2394395