DocumentCode
2395263
Title
Performance Enhancement of Gap Closing Electrostatic MEMS Converters
Author
Salem, Mona S. ; Salem, Marwa S. ; Zekry, A.A. ; Ragai, H.F.
Author_Institution
ECE Dept., Ain Shams Univ.
fYear
2006
fDate
Dec. 2006
Firstpage
45
Lastpage
47
Abstract
This paper proposes new ideas to enhance the output power of the gap closing electrostatic MEMS converters. This is done by including the effect of the parallel capacitance of the converter in the output power equation. In addition the output power of the converter has increased by increasing the converter thickness
Keywords
electrostatic devices; micromechanical devices; power convertors; electrostatic MEMS converters; output power equation; parallel capacitance; performance enhancement; Capacitance; Electrostatics; Equations; Fingers; Micromechanical devices; Permittivity; Power generation; Springs; Voltage; Wireless sensor networks;
fLanguage
English
Publisher
ieee
Conference_Titel
MEMS, NANO and Smart Systems, The 2006 International Conference on
Conference_Location
Cairo
Print_ISBN
1-4244-0899-7
Type
conf
DOI
10.1109/ICMENS.2006.348214
Filename
4155231
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