A 10.4 in.-diagonal full-colour TFT-LCD with new self-aligned a-Si TFTs for OHP system

Author

Katayama, Mikio ; Nakazawa, Kiyoshi ; Kanemori, Yuzuru ; Katagami, Masayuki ; Kanatani, Yoshiharu ; Yano, Kouzou ; Hijikigawa, M.

Author_Institution

Sharp Corp., Nara, Japan

fYear

1991

fDate

15-17 Oct. 1991

Firstpage

243

Lastpage

246

Abstract

A 10.4-in-diagonal full-color a-Si TFT-LCD (thin-film transistor liquid crystal display) for OHP (overhead projector) systems has been developed. The light degradation of LCD performance has been suppressed by new self-aligned a-Si TFTs and a new driving method (floating gate driving method). Both an ES (etching stopper)-SiN/sub x/ layer and a mu c-Si(n+)a-Si(i) layer were formed by the self-alignment technique. This structure is considered to be effective for decreasing the photocarrier injected into the gate-insulator. High stability under high intense light-exposure has been obtained. The driving method makes the difference of the potential between the gate and drain electrode constant. It improved the off characteristics and decreased the shift of the gate bias voltage transparency characteristics.<>

Keywords

amorphous semiconductors; driver circuits; elemental semiconductors; liquid crystal displays; optical projectors; silicon; thin film transistors; 10.4 inch; Si-SiN/sub x/; channel passivation; colour TFT LCD; etching stopper; floating gate driving; gate bias voltage transparency; gate-insulator; light degradation; microcrystalline Si(n/sup +/); off characteristics; overhead projector; photocarrier; self-alignment; shift; thin-film transistor liquid crystal display; Active matrix technology; Computer displays; Degradation; Electrodes; Etching; Insulation; Liquid crystal displays; Stability; Testing; Thin film transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Display Research Conference, 1991., Conference Record of the 1991 International

Conference_Location

San Diego, CA, USA

Print_ISBN

0-7803-0213-3

Type

conf

DOI

10.1109/DISPL.1991.167480

Filename

167480