• DocumentCode
    2402815
  • Title

    Recent advancements in sputter-type heavy negative ion sources

  • Author

    Alton, G.D.

  • Author_Institution
    Oak Ridge Nat. Lab., TN, USA
  • fYear
    1989
  • fDate
    20-23 Mar 1989
  • Firstpage
    1112
  • Abstract
    Significant advancements have been made in sputter-type negative ion sources which utilize (1) direct surface ionization or (2) a plasma to form the positive ion beam used to effect sputtering of samples containing the material of interest. Typically, such sources can be used to generate unstable beam intensities of a few microamperes to several milliamperes from all chemically active elements, depending on the particular source and the electron affinity of the element in question. An introduction to the fundamental processes underlying negative ion formation by sputtering from a low-work-function surface is presented. Several sources which reflect the progress made in this technology are described
  • Keywords
    ion sources; sputtering; chemically active elements; direct surface ionization; electron affinity; low-work-function surface; plasma; positive ion beam; sputter-type heavy negative ion sources; unstable beam intensities; Chemical elements; Chemical technology; Electron beams; Ion beams; Ion sources; Ionization; Plasma chemistry; Plasma materials processing; Plasma sources; Sputtering;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Particle Accelerator Conference, 1989. Accelerator Science and Technology., Proceedings of the 1989 IEEE
  • Conference_Location
    Chicago, IL
  • Type

    conf

  • DOI
    10.1109/PAC.1989.73368
  • Filename
    73368