DocumentCode
2402815
Title
Recent advancements in sputter-type heavy negative ion sources
Author
Alton, G.D.
Author_Institution
Oak Ridge Nat. Lab., TN, USA
fYear
1989
fDate
20-23 Mar 1989
Firstpage
1112
Abstract
Significant advancements have been made in sputter-type negative ion sources which utilize (1) direct surface ionization or (2) a plasma to form the positive ion beam used to effect sputtering of samples containing the material of interest. Typically, such sources can be used to generate unstable beam intensities of a few microamperes to several milliamperes from all chemically active elements, depending on the particular source and the electron affinity of the element in question. An introduction to the fundamental processes underlying negative ion formation by sputtering from a low-work-function surface is presented. Several sources which reflect the progress made in this technology are described
Keywords
ion sources; sputtering; chemically active elements; direct surface ionization; electron affinity; low-work-function surface; plasma; positive ion beam; sputter-type heavy negative ion sources; unstable beam intensities; Chemical elements; Chemical technology; Electron beams; Ion beams; Ion sources; Ionization; Plasma chemistry; Plasma materials processing; Plasma sources; Sputtering;
fLanguage
English
Publisher
ieee
Conference_Titel
Particle Accelerator Conference, 1989. Accelerator Science and Technology., Proceedings of the 1989 IEEE
Conference_Location
Chicago, IL
Type
conf
DOI
10.1109/PAC.1989.73368
Filename
73368
Link To Document