Toroid microinductors with magnetic nanocomposite cores

This paper presents toroid microinductors with magnetic cores consisting of a novel metal-polymer nanocomposite. The investigations aim at fulfilling the demands of small size, high inductance, high operation frequency, and adequate quality factors required for modern mobile communication electronics. The high-frequency behaviour of the toroid inductors was simulated using the Ansoft HFSS field simulator. The simulations show the dependence of the self resonant frequency of the toroid and number of coil turns if the geometry is otherwise fixed. The terminal impedance Z₁₁ is determined from measured and simulated S₁₁ parameters. The comparison of simulated and measured parameters shows reasonable agreement in the high frequency behavior. Inductors were manufactured using thin film deposition techniques, photolithography, electroplating, and etching processes. The magnetic core material was prepared by sputtering.