DocumentCode
2407605
Title
On the ignition voltage behavior of microwave microplasmas
Author
Kühn, Silvio ; Andrei, Cristina ; Gesche, Roland
Author_Institution
Ferdinand-Braun-Inst. fur Hochstfrequenztechnik, Berlin
fYear
2007
fDate
9-12 Oct. 2007
Firstpage
616
Lastpage
619
Abstract
Small-sized plasmas excited at microwave frequencies offer interesting applications from industrial processing to medicine. This paper presents first data on the ignition voltages of such microwave microplasmas. Using a quarter-wavelength resonant structure, an automated test system was set up, which allows to perform multiple ignition tests for each parameter constellation. Ignition voltage statistics are reported as well as the dependence on gas pressure for Ar, He and air in the range from 0.6 mbar to atmospheric pressure.
Keywords
microwave devices; plasma devices; resonators; automated test system; gas pressure; ignition voltage behavior; microwave microplasmas; multiple ignition tests; parameter constellation; quarter wavelength resonant structure; Automatic testing; Ignition; Microwave frequencies; Performance evaluation; Plasma applications; Plasma materials processing; Resonance; Statistics; System testing; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference, 2007. European
Conference_Location
Munich
Print_ISBN
978-2-87487-001-9
Type
conf
DOI
10.1109/EUMC.2007.4405267
Filename
4405267
Link To Document