DocumentCode
2408028
Title
2006 IEEE Workshop on Microelectronics and Electron Devices (IEEE Cat. No. 06EX1374C)
fYear
2006
fDate
14-14 April 2006
Abstract
The following topics are dealt with: circuit design; MEMS; semiconductor devices; sensors; advanced processing and reliability
Keywords
integrated circuit design; integrated circuit technology; micromechanical devices; microsensors; semiconductor devices; semiconductor technology; MEMS; advanced processing; circuit design; microelectronics; reliability; semiconductor devices; sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronics and Electron Devices, 2006. WMED '06. 2006 IEEE Workshop on
Conference_Location
Boise, ID
Print_ISBN
1-4244-0374-X
Type
conf
DOI
10.1109/WMED.2006.1678269
Filename
1678269
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