Secondary ion mass spectrometry analysis of wafer contamination resulting from gloved hands

It is well known that wafer-handling protocols to avoid contamination are a mandatory part of semiconductor fabrication. One of the most important pieces of the standard "cleanroom" suit is the glove worn to eliminate contamination from human skin, of which mobile ions from fingerprint oils are a major contributor. This paper shows that wafer handling, even with fabrication-recommended gloves in place, can still significantly contaminate the wafer