Research on force-frequency characteristic and stability of multi-electrode quartz crystal resonat

According to energy trap theory and finite element analyze, we plated several electrodes on the same quartz substrate. And a multi-electrode quartz crystal resonator is created. We study the force-frequency characteristic of resonators and output of slip frequency on different positions of quartz substrate by adding radial force. Simultaneously the resonator vibration state stability of this kind of structure is tested and analyzed by using crystal frequency stability instrument. The result proved that the force-frequency characteristic of resonators on different positions of quartz substrate is different, and the difference of force-frequency conversion coefficient can reach more than six times. When resonators were drive by integrated circuit, the stability of vibration frequency can get to 10-10 degree.