DocumentCode
2410129
Title
RF transmission lines and spiral inductors using polymer-core conductor
Author
Yook, Jong-Min ; Kyoung-Min Kim ; Yeo, Sung-Ku ; Yu, Je-In ; Kwon, Young-Se
Author_Institution
Korea Adv. Inst. of Sci. & Technol., Daejeon
fYear
2007
fDate
9-12 Oct. 2007
Firstpage
1145
Lastpage
1148
Abstract
Thick RF transmission lines and spiral inductors were made using polymer-core conductor. The proposed fabrication process to make polymer-core conductor is very easy and cost effective compared with other RF MEMS processes. SU-8 photoresist was used as core. The fabricated transmission line and spiral inductors on a HRS (High Resistivity Silicon, 2500 Omega-Cm) have S21 of 0.08 dB/mm at 18 GHz and high Q factor more than 40 at 2 GHz respectively.
Keywords
inductors; photoresists; polymers; radiofrequency integrated circuits; transmission lines; RF transmission lines; SU-8 photoresist; high resistivity silicon; polymer-core conductor; spiral inductors; Conductors; Costs; Fabrication; Inductors; Polymers; Radio frequency; Radiofrequency microelectromechanical systems; Resists; Spirals; Transmission lines; High Q; Inductor; Polymer-core conductors; SU-8;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference, 2007. European
Conference_Location
Munich
Print_ISBN
978-2-87487-001-9
Type
conf
DOI
10.1109/EUMC.2007.4405401
Filename
4405401
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