• DocumentCode
    2410537
  • Title

    Degradation of metal-induced laterally crystallized n-type poly-Si thin-film transistors under dynamic voltage stress

  • Author

    Zhang, Meng ; Wang, Mingxiang ; Wang, Huaisheng

  • Author_Institution
    Dept. of Microelectron., Soochow Univ., Suzhou
  • fYear
    2008
  • fDate
    7-11 July 2008
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    Degradation of metal-induced laterally crystallized n-type poly-Si TFTs is systematically investigated under synchronized Vg and Vd stresses. In low frequencies, degradation independent of frequency is the same as that in DC self-heating stress, while in high frequencies, frequency dependent degradation is attributed to an additional mechanism associated with pulse rising/falling edges.
  • Keywords
    thin film transistors; DC self-heating stress; dynamic voltage stress; falling edges; frequency dependent degradation; metal-induced laterally crystallized transistors; n-type poly-Si thin-film transistors; pulse rising; Annealing; Crystallization; Degradation; Frequency synchronization; Microelectronics; Space vector pulse width modulation; Stress control; Temperature; Thin film transistors; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Physical and Failure Analysis of Integrated Circuits, 2008. IPFA 2008. 15th International Symposium on the
  • Conference_Location
    Singapore
  • Print_ISBN
    978-1-4244-2039-1
  • Electronic_ISBN
    978-1-4244-2040-7
  • Type

    conf

  • DOI
    10.1109/IPFA.2008.4588214
  • Filename
    4588214