DocumentCode
2413788
Title
Electron trapping: An unexpected mechanism of NBTI and its implications
Author
Campbell, J.P. ; Cheung, K.P. ; Suehle, J.S. ; Oates, A.
Author_Institution
Div. of Semicond. Electron., NIST, Gaithersburg, MD
fYear
2008
fDate
17-19 June 2008
Firstpage
76
Lastpage
77
Abstract
In this work, we demonstrate that electron trapping has been overlooked in previous studies and will greatly impact the current understanding of the NBTI phenomenon and consequent lifetime predictions.
Keywords
CMOS integrated circuits; electron traps; integrated circuit reliability; NBTI; electron trapping; lifetime predictions; negative bias temperature instability; Charge carrier processes; Degradation; Electron traps; Interface states; Niobium compounds; Pulse measurements; Stress; Time measurement; Titanium compounds; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, 2008 Symposium on
Conference_Location
Honolulu, HI
Print_ISBN
978-1-4244-1802-2
Electronic_ISBN
978-1-4244-1803-9
Type
conf
DOI
10.1109/VLSIT.2008.4588568
Filename
4588568
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