• DocumentCode
    241539
  • Title

    III–V-IV integration toward electronics and photonics convergence on a silicon platform

  • Author

    Kei May Lau ; Qiang Li

  • Author_Institution
    Dept. of Electron. & Comput. Eng., Hong Kong Univ. of Sci. & Technol., Kowloon, China
  • fYear
    2014
  • fDate
    28-31 Oct. 2014
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    Integration of III-V compound semiconductor devices on a Si manufacturing platform represents one of the most topical challenges today. Potentially, such heterogeneous integration can offer numerous opportunities in combining the unique electronic and photonic functionalities of III-V technology with the large volume, low cost and high density Si CMOS technology. Here we review the major challenges and our recent progress in monolithic integration of III-V materials on Si by direct epitaxy and its device applications. Several importance techniques to achieve high crystalline quality III-V semiconductors on Si are presented and their distinct advantages and limitations are discussed.
  • Keywords
    CMOS integrated circuits; III-V semiconductors; elemental semiconductors; epitaxial growth; integrated optoelectronics; silicon; III-V compound semiconductor device; III-V-IV integration; Si; direct epitaxy; electronic functionality; heterogeneous integration; high density CMOS technology; monolithic integration; photonic functionality; silicon manufacturing platform; Abstracts; Annealing; Gallium arsenide; Indium phosphide; Silicon; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State and Integrated Circuit Technology (ICSICT), 2014 12th IEEE International Conference on
  • Conference_Location
    Guilin
  • Print_ISBN
    978-1-4799-3296-2
  • Type

    conf

  • DOI
    10.1109/ICSICT.2014.7021190
  • Filename
    7021190