DocumentCode

2416662

Title

Improving track density by lithography

Author

Gau, J.S.

fYear

1990

fDate

17-20 April 1990

Keywords

Lithography;

fLanguage

English

Publisher

ieee

Conference_Titel

Magnetics Conference, 1990. Digests of INTERMAG '90. International

Conference_Location

Brighton, UK

Type

conf

DOI

10.1109/INTMAG.1990.734374

Filename

734374