DocumentCode
2419650
Title
3D High Aspect Ratio Micro Structures Fabricated by One Step UV Lithography
Author
Yang, W. ; Wang, T. ; Huang, H. ; Fu, C.
Author_Institution
Inst. of MEMS, National Tsing-Hua Univ.
fYear
2007
fDate
16-19 Jan. 2007
Firstpage
571
Lastpage
574
Abstract
We are going to present in this paper an interesting idea to fabricate 3D high aspect ratio micro structures. Pillars with different heights can be generated with one step UV lithography. Various 3D micro structures have been successfully fabricated. We will introduce the idea of this approach, fabrication details, and plenty of successful experimental results in this paper. A Taiwan 3D terrain map will be selected to demonstrate the ability of the proposed method.
Keywords
terrain mapping; ultraviolet lithography; 3D high aspect ratio microstructures; 3D microstructures fabrication; Taiwan 3D terrain map; UV lithography; Back; Fabrication; Light sources; Lithography; Microstructure; Needles; Resists; Synchrotrons; Systems engineering and theory; Viscosity;
fLanguage
English
Publisher
ieee
Conference_Titel
Nano/Micro Engineered and Molecular Systems, 2007. NEMS '07. 2nd IEEE International Conference on
Conference_Location
Bangkok
Print_ISBN
1-4244-0610-2
Type
conf
DOI
10.1109/NEMS.2007.352083
Filename
4160386
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