Studies on integrated virtual equipment simulation system

This paper puts forward the architecture of integrated virtual equipment simulation system based on the ideas of advanced manufacturing technology, and analyses the key techniques to be implemented among the system module. Taking use of the development kits, such as Open Inventor and Visual Studio.net, we have carried out the system that have the functions, including virtual assembly simulation, engineering analysis visualization, and working process simulation etc.. An applied case is presented by taking semiconductor manufacturing equipment PECVD as an example to illustrate the process of virtual simulation, this concludes that the integrated virtual simulation system is accurate and the simulation effect has been validated.