Virtual Operation of MEMS Devices Based on FEM Simulation

This paper presents the virtual operation of typical MEMS devices based on finite element method (FEM). The model implemented in the virtual environment which simulates the kinematics of MEMS device is constructed from the result of finite element analysis (FEA). According to linear finite element computation theory, extensive linear characteristic will be introduced in the paper. This characteristic can be utilized in the modeling procedure of MEMS devices by using polynomial fit of FEA result. Order and parameter identification of polynomial fit are required. Due to the extensive linear characteristic, linear coefficients are found in the polynomial fit expressions which capture most of the accuracy and flexibility of kinematical behavior of MEMS device. Also the general virtual operation system which simulates the mechanical behavior of some typical MEMS device using virtual reality technology has been proposed. Kinematical model based on FEM simulation has been developed and successively implemented in the virtual environment.