DocumentCode
2423523
Title
Influence of electron-neutral collision cross sections on swarm parameters in argon
Author
Ul-Haq, Saeed ; Raju, Gorur
Author_Institution
Dept. of Electr. & Comput. Eng., Windsor Univ., Ont., Canada
fYear
2003
fDate
19-22 Oct. 2003
Firstpage
436
Lastpage
439
Abstract
To understand electrical discharges in gases, and for accurate plasma chemistry modeling, the major input is reliable electron-neutral collision cross section data. To have accurate information assessment, analysis and review of data on cross section in the available literature have been carried out. Each set of data was utilized, and its influence on the swarm parameters such as electron drift velocity or mobility, ionization growth, and diffusion coefficients are investigated. The electric field to gas density ratios (E/N) cover the wide range of 1 to 1000 Td. In support of this effort, finally a set of collision cross sections data for argon was derived. This modified and recommended set of data consisting of momentum transfer, elastic, excitation and ionization cross sections can accurately reproduce the macroscopic observables that are relevant to the real plasmas. Calculation of transport coefficients was carried out by using the numerical solution of Boltzmann equation (Bolsig).
Keywords
Boltzmann equation; argon; discharges (electric); ionisation; plasma collision processes; Ar; Boltzmann equation; diffusion coefficients; elastic cross sections; electric field to gas density ratios; electrical discharges; electron drift velocity; electron mobility; electron-neutral collision cross sections; excitation cross sections; gases; ionization cross sections; ionization growth; momentum transfer; swarm parameters; Argon; Electron mobility; Gases; Ionization; Kinetic energy; Plasma applications; Plasma chemistry; Plasma materials processing; Plasma transport processes; Plasma welding;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrical Insulation and Dielectric Phenomena, 2003. Annual Report. Conference on
Print_ISBN
0-7803-7910-1
Type
conf
DOI
10.1109/CEIDP.2003.1254886
Filename
1254886
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