Design and simulation of two Z-axis microgyroscopes with different types of decoupled structures

In this paper, microgyroscopes using fully decoupled structure (FDS) and partially decoupled structure (PDS) were designed. They both consist of dual proof mass, sense frame and drive frame structure. Sense frame is directly anchored on the substrate in FDS. The cross talk between drive mode and sense mode was investigated. The ANSYS software has been used to simulate two types of decoupled Z-axis microgyroscopes for performance comparison. The cross-talk displacement ratio η_Dts in FDS is 0.19% at the frequency of 6650 Hz and η_Dts in PDS is 0.24% at the frequency of 5776 Hz. The results show that the FDS microgyroscopes have lower quadrature-error effect than PDS. The noise level of both FDS and PDS microgyroscopes are 0.362 deg/hr/√Hz and 0.44 deg/hr/√Hz, respectively.