The experimental model of micro-cantilever switch and its optimization model

Author

Guo, F.M. ; Xiao, Y.C. ; Sun, Z.Y. ; Lai, Z.S.

Author_Institution

Key Lab. of Polarized Mater. & Device, East China Normal Univ., Shanghai, China

fYear

2010

fDate

20-23 Jan. 2010

Firstpage

1

Lastpage

4

Abstract

This paper studied the original model of the switch, which has a full-contact pull down voltage of 13.7V. And the RF results are measured firstly by Cascade 12000 microwave probe in order to calculate the parameter of the equivalent circuit. The equivalent circuit is built to study the RF performance and the s-parameters are studied by ADS. However, the high actuation voltage will degrade the switch life. Then four optimized geometric models are compared in order to obtain the lowest actuation voltage. Finally, the model of trapezium shape has the longest life span 1.452×10⁶ and smallest full-contact down voltage 6.3V.

Keywords

S-parameters; equivalent circuits; microswitches; ADS; Cascade 12000 microwave probe; S-parameters; equivalent circuit; full-contact pull down voltage; micro-cantilever switch; optimization model; voltage 13.7 V; voltage 6.3 V; Young´s Module; actuation voltage; beam; equivalent circuit; optimization model;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on

Conference_Location

Xiamen

Print_ISBN

978-1-4244-6543-9

Type

conf

DOI

10.1109/NEMS.2010.5592195

Filename

5592195