Parylene-coated NMOSFET-embedded cantilevers for surface stress sensing in liquid environment

Author

Wang, J. ; Huang, Y. ; Wu, W.G. ; Hao, Y.L.

Author_Institution

Nat. Key Lab. of Sci. & Technol. on Micro/Nano Fabrication, Peking Univ., Beijing, China

fYear

2010

fDate

20-23 Jan. 2010

Firstpage

255

Lastpage

258

Abstract

This paper reports a parylene-coated nMOSFET (n-type metal-oxide-semiconductor field-effect transistor)-embedded cantilever, which is suitable for the detection of chemical or biological molecules in liquid phase based on the surface stress sensing principle. The silicon cantilevers are configured along <;110> direction, and the channels of the embedded-nMOSFETs are perpendicular to the cantilevers. The fabrication process based upon POST-CMOS (complementary MOS) technology for making these devices on silicon-on-insulator (SOI) wafers is reported. The functionality of the sensor is preliminarily proven by the detection of 1-octanethiol in absolute ethanol.

Keywords

MOSFET; cantilevers; chemical variables measurement; liquids; microfabrication; microsensors; silicon-on-insulator; stress measurement; POST-CMOS; Parylene-coated NMOSFET; biological molecule detection; chemical molecule detection; fabrication process; liquid environment; sensor; silicon cantilevers; silicon-on-insulator; surface stress sensing; Cantilever; Liquid environment; NMOSFET; Surface stress;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on

Conference_Location

Xiamen

Print_ISBN

978-1-4244-6543-9

Type

conf

DOI

10.1109/NEMS.2010.5592202

Filename

5592202