Rapid and nondestructive evaluations of conductivity by spectroscopic measurements at plasma edge

We report our evaluation of metallic material electric conductivity in terms of spectroscopic reflectometry at plasma edges for examining rapid and nondestructive micro components in microsystem. Conductivity (i.e., the mean free time of conduction electron) estimations were obtained through spectral measurements and fitting operations conducted with a theoretical model using copper and silver metal films. The validity of the Drude-Lorentz hybrid model and that of set parameters were confirmed and the mean free time was estimated by fitting with the peak height and the wavelength in the differential reflection spectrum as criteria. Significant differences in extracted conductivity values obtained through the process conditions (e.g., crystalline deficiency density and the existence of impurities) were recognized.