• DocumentCode
    2433098
  • Title

    Low temperature synthesis and field emission of carbon nanotubes using radio frequency plasma enhanced CVD

  • Author

    Yong-Xiang, Liu ; Jun-Hua, Liu ; Chang-Chun, Zhu

  • Author_Institution
    Sch. of Electr. Eng., Xian Jiaotong Univ., Xian, China
  • fYear
    2010
  • fDate
    20-23 Jan. 2010
  • Firstpage
    671
  • Lastpage
    675
  • Abstract
    Carbon nanotubes (CNTs) on a glass substrate at a dramatic low temperature was obtained by a radio frequency plasma enhanced thermal chemical vapor deposition. Nickel film was heated and activated at 450°C with 2400 W rf plasma power, the deposition of the CNTs was performed for 60 minutes with 600 W, 1500 W and 2400 W rf plasma power. The diameters of the CNTs obtained are from 8 to 40 nm and the lengths are about over 1.0 um. SEM micrographs show the lower synthesis plasma power can do better for the CNTs synthesis than the exorbitant rf plasma, the Raman spectra and Field emission properties proved this result. The field emission of the film shows the turn-on emission threshold field is 1.17 V/um at an emission current density of 1 uA/cm. At this temperature, the glass did not exhibit deformation; electron emission sufficient for flat panel displays is an important progress in the integrated progress of glass sealed field emission displays.
  • Keywords
    Raman spectra; carbon nanotubes; current density; glass; plasma CVD; scanning electron microscopy; substrates; C; Ni; Raman spectra; SEM micrographs; carbon nanotubes; current density; field emission; glass substrate; low temperature synthesis; nickel film; power 1500 W; power 2400 W; power 600 W; radiofrequency plasma enhanced CVD; rf plasma power; temperature 450 degC; thermal chemical vapor deposition; time 60 min; Carbon nanotubes; Chemical vapor deposition; Field emission; Low temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on
  • Conference_Location
    Xiamen
  • Print_ISBN
    978-1-4244-6543-9
  • Type

    conf

  • DOI
    10.1109/NEMS.2010.5592494
  • Filename
    5592494