The alignment of carbon nano tube between Aluminum electrodes using AC dielectrophoresis method

Author

Wah, Low Foo ; Halim, Nur Hamidah Abdul ; Hashim, Uda ; Nor, Nuzaihan Md ; Shamsuddin, Shahidah Arina

Author_Institution

Inst. of Nano Electron. Eng. (INEE), Univ. Malaysia Perlis (UniMAP), Kangar, Malaysia

fYear

2011

fDate

28-30 Sept. 2011

Firstpage

259

Lastpage

262

Abstract

This paper presents the recent development and fabrication of carbon nanotubes (CNT) based on electrical devices. The silicon oxide is formed by dry oxidation and the Aluminum (Al) layer is deposited using Thermal Evaporator. The electrodes pad act as a bridge for CNT alignment. Then, this single-walled carbon nanotubes (SWNTs) was suspended in isopropyl alcohol (IPA) and Dichloromethane (DCM) solution in ultrasonic condition around 1 hour continuously. Then, the aligment of the CNT was carried out using AC dielectrophoresis and DC electrophoresis method.

Keywords

aluminium; carbon nanotubes; electrochemical electrodes; electrophoresis; oxidation; silicon compounds; AC dielectrophoresis method; Al; CNT fabrication; DC electrophoresis method; SiO₂; aluminum electrode pad; carbon nanotube alignment; dichloromethane solution; dry oxidation; electrical devices; isopropyl alcohol; single-walled carbon nanotubes; thermal evaporator; Aluminum; Carbon nanotubes; Dielectrophoresis; Electrodes; Scanning electron microscopy; Silicon; AC dielectrophoresis method; CNT; DC electrophoresis method;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro and Nanoelectronics (RSM), 2011 IEEE Regional Symposium on

Conference_Location

Kota Kinabalu

Print_ISBN

978-1-61284-844-0

Type

conf

DOI

10.1109/RSM.2011.6088338

Filename

6088338