DocumentCode

2434216

Title

Mechanism of Composition Change in Sputter Deposition of Barium Ferrite Films with sputtering Gas Pressure

Author

Suzuki, Einoshin ; Hoshi, Yusuke ; Naoe, Masayuki

Author_Institution

Tokyo Inst. of Polytechnics

fYear

1998

fDate

6-9 Jan. 1998

Firstpage

19

Lastpage

19

Keywords

Annealing; Atomic layer deposition; Atomic measurements; Barium; Coercive force; Ferrite films; Iron; Magnetic films; Magnetic properties; Sputtering;

fLanguage

English

Publisher

ieee

Conference_Titel

MMM-Intermag Conference, 1998. Abstracts., The 7th Joint

Conference_Location

San Francisco, CA, USA

Print_ISBN

0-7803-5118-5

Type

conf

DOI

10.1109/INTMAG.1998.735492

Filename

735492