Fully coupled electro-thermal simulation of a micro pirani gauge

Author

Jiang, Wei ; Zhou, Jilong ; Wang, Xin ; Wang, Long ; Zhang, Jinwen

Author_Institution

Nat. Key Lab. of Sci. & Technol. on Micro/Nano Fabrication, Peking Univ., Beijing, China

fYear

2010

fDate

20-23 Jan. 2010

Firstpage

1088

Lastpage

1091

Abstract

In this paper, fully coupled electro-thermal simulation of a micro pirani gauge is presented. The simulation was carried out using CFD-ACE+ software, based on Finite Volume Method (FVM) for multi-disciplinary modeling. Temperature coefficient of resistance (TCR) of silicon was taken into account for solving the joule heating and heat transfer equations. The influence of physical parameters on the dynamic range and sensitivity of micro pirani gauges was systematically studied for optimization. The simulation result was compared with and corrected by the performance of the micro pirani gauge fabricated by bulk micromachining technology.

Keywords

finite volume methods; heat transfer; micromachining; micromechanical devices; optimisation; sensitivity; vacuum gauges; vacuum measurement; ACE software; CFD software; bulk micromachining technology; electrothermal simulation; finite volume method; heat transfer equations; joule heating; micro pirani gauge; multi-disciplinary modeling; optimization; sensitivity; silicon; temperature coefficient of resistance; electro-thermal simulation; finite volume method; pirani gauge;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on

Conference_Location

Xiamen

Print_ISBN

978-1-4244-6543-9

Type

conf

DOI

10.1109/NEMS.2010.5592557

Filename

5592557