Micro device mould fabrication based on two-photon polymerization and electroforming

Author

Ding, Junjun ; Zhai, Zhongping ; He, Jijun ; Li, Jiawen ; Wang, Xiang ; Huang, Wenhao

Author_Institution

Dept. of Precision Machinery & Precision Instrum., Univ. of Sci. & Technol. of China, Hefei, China

fYear

2010

fDate

20-23 Jan. 2010

Firstpage

1074

Lastpage

1078

Abstract

A novel method of the micro device mould fabrication is reported, which combine the femtosecond two-photon polymerization and micro electroforming. As example of the results, a 2×2 micro lens array (MLA) with diameter of 10μm and a micro gear are fabricated using S-3 photo resist by two-photon polymerization, which use an alternative annular scanning mode with continuous variable layer space after parameter optimization to achieve good surface appearance. Then the MLA and the micro gear are electroformed to obtain nickel mould. Compared to the conventional method, this work provides an alternative, fast and effective processing method for the fabrication of micro device mould that requires arbitrary shape with high surface quality and small scale.

Keywords

electroforming; microfabrication; microlenses; moulding; polymerisation; two-photon processes; annular scanning mode; continuous variable layer space; electroforming; microdevice mould fabrication; microgear; microlens array; two-photon polymerization; femtosecond laser; micro electroforming; micro fabrication; two-photon polymerization;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on

Conference_Location

Xiamen

Print_ISBN

978-1-4244-6543-9

Type

conf

DOI

10.1109/NEMS.2010.5592564

Filename

5592564