DocumentCode
2438719
Title
Polycrystalline CVD diamond-a new dielectric material for microwave electronics
Author
Ralchenko, V.G. ; Konov, V.I. ; Parshin, V.V. ; Garin, B.M. ; Heidinger, R.
Author_Institution
Natural Sci. Center of Gen. Phys. Inst., Russian Acad. of Sci., Moscow, Russia
fYear
2003
fDate
8-12 Sept. 2003
Firstpage
547
Lastpage
548
Abstract
Properties of polycrystalline diamond wafers produced by chemical vapor deposition (CVD) are described which show their importance for applications in microwave electronics. Today CVD diamonds become an engineering material whose unique thermal and electrophysical parameters make it very promising for a new generation of microwave devices.
Keywords
diamond; dielectric materials; microwave devices; plasma CVD; CVD; chemical vapor deposition; electrophysical parameter; engineering material; microwave electronics; polycrystalline diamond wafer; Chemical vapor deposition; Crystallization; Dielectric materials; Hidden Markov models; Microwave technology; Organizing; Plasmas; Pulse width modulation; Rough surfaces; Surface roughness;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave and Telecommunication Technology, 2003. CriMiCo 2003. 13th International Crimean Conference
Conference_Location
Sevastopol, Crimea, Ukraine
Print_ISBN
966-7968-26-X
Type
conf
DOI
10.1109/CRMICO.2003.158928
Filename
1256614
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