DocumentCode
2440304
Title
Characterization of RF Sputtered ZnO and ZnS Thin Films for SAW Transducers by X-Ray Diffraction Analysis
Author
Schoenwald, J.S. ; Keester, K.L. ; Staples, E.J.
fYear
1979
fDate
1979
Firstpage
926
Lastpage
931
Keywords
Glass; Piezoelectric films; Radio frequency; Sputtering; Substrates; Surface acoustic waves; Transducers; X-ray diffraction; Zinc compounds; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
1979 Ultrasonics Symposium
Type
conf
DOI
10.1109/ULTSYM.1979.197339
Filename
1534279
Link To Document