DocumentCode
2441137
Title
Surface Chemistry Related to SAW Resonator Aging
Author
Schoenwald, J.S. ; Harker, A.B. ; Ho, W.W. ; Wise, J. ; Staples, E.J.
fYear
1980
fDate
1980
Firstpage
193
Lastpage
199
Keywords
Acoustic propagation; Acoustic waves; Aging; Chemicals; Chemistry; Frequency; Gases; Plasma measurements; Surface acoustic wave devices; Surface acoustic waves;
fLanguage
English
Publisher
ieee
Conference_Titel
1980 Ultrasonics Symposium
Type
conf
DOI
10.1109/ULTSYM.1980.197385
Filename
1534325
Link To Document