Low Loss 0.9-1.9 GHz SAW Filters with Submicron Finger Period Electrodes

Author

Urabe, S. ; Asakawa, K. ; Itoh, M. ; Gokan, H. ; Esho, S. ; Nishikawa, K. ; Nishihara, T.

fYear

1980

fDate

1980

Firstpage

371

Lastpage

376

Keywords

Band pass filters; Electrodes; Electron beams; Fabrication; Fingers; Insertion loss; Ion beams; Resists; SAW filters; Sputter etching;

fLanguage

English

Publisher

ieee

Conference_Titel

1980 Ultrasonics Symposium

Type

DOI

10.1109/ULTSYM.1980.197422

Filename

1534362

Link To Document