DocumentCode
2445101
Title
Enhanced oxygen adsorption activity by CuO catalyst clusters on SnO2 thin film based sensors
Author
Chowdhuri, Arijit ; Haridas, Divya ; Sreenivas, K. ; Gupta, Vinay
Author_Institution
Acharya Narendra Dev Coll., Univ. of Delhi, New Delhi
fYear
2008
fDate
Nov. 30 2008-Dec. 3 2008
Firstpage
553
Lastpage
556
Abstract
Resistance characteristics of thin film sensors based on uncoated SnO2, SnO2 with CuO overlayer and SnO2 with CuO dotted clusters are compared in three different backgrounds of air, oxygen and vacuum. Measurements for the three sensor configurations are carried out as a function of temperature. The novel dispersal method of CuO catalyst in the form of dotted clusters is seen to enhance the oxygen adsorption activity on surface of SnO2 thin film sensors. Conversion of molecular oxygen (O2 -) to atomic oxygen (O-) is shown to reduce the concentration of charge carriers in the conduction band of SnO2 film. Co-existence of a greater amount of adsorbed oxygen on the SnO2 film surface in conjunction with modulation of the space-charge region at the CuO-SnO2 interface are attributed to influence the resistance of the sensor structures under reducing gas.
Keywords
adsorption; catalysts; conduction bands; copper compounds; electrical resistivity; oxygen; semiconductor materials; semiconductor thin films; space charge; thin film sensors; tin compounds; O2; SnO2; SnO2-CuO; catalyst clusters; charge carriers; conduction band; film surface; oxygen adsorption activity; resistance characteristics; sensor configurations; space-charge; temperature function; thin film sensors; Charge carriers; Electrons; Gas detectors; Semiconductivity; Semiconductor thin films; Sensor phenomena and characterization; Sputtering; Surface resistance; Temperature sensors; Thin film sensors; Gas Sensor; adsorption; sputtering; thin films;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensing Technology, 2008. ICST 2008. 3rd International Conference on
Conference_Location
Tainan
Print_ISBN
978-1-4244-2176-3
Electronic_ISBN
978-1-4244-2177-0
Type
conf
DOI
10.1109/ICSENST.2008.4757167
Filename
4757167
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