DocumentCode
2445236
Title
Pressure and Acceleration Sensitivity of a SAW Interferometer
Author
Staples, E.J. ; Wise, J. ; DeWames, R.E.
fYear
1981
fDate
14-16 Oct. 1981
Firstpage
155
Lastpage
158
Keywords
Acceleration; Amplitude modulation; Capacitive sensors; Damping; Electrodes; Fabrication; Frequency; Resonance; Structural beams; Surface acoustic waves;
fLanguage
English
Publisher
ieee
Conference_Titel
1981 Ultrasonics Symposium
Conference_Location
Chicago, IL, USA
Type
conf
DOI
10.1109/ULTSYM.1981.197600
Filename
1534540
Link To Document