High performance motion tracking control

Motion control in electronic manufacturing requires high speed and precision. Due to the large production volume, even a small improvement in the motion control performance can result in significant economic gains. This work presents an experimental study of the feedforward controller design for a point-to-point motion control system. We systematically apply model identification, inverse dynamics control, iterative refinement (to address system nonlinearities), and adaptive least-mean-square to achieve high speed trajectory tracking. Experimental results are provided to show the efficacy of the proposed approach.