DocumentCode
2448140
Title
Thermal-Wave Microscopy of Semiconductor Devices
Author
Rosencwaig, Allan
fYear
1981
fDate
14-16 Oct. 1981
Firstpage
828
Lastpage
831
Keywords
Acoustic beams; Acoustic imaging; Acoustic signal detection; Acoustic waves; Frequency; High-resolution imaging; Microscopy; Photothermal effects; Semiconductor devices; Thermoelasticity;
fLanguage
English
Publisher
ieee
Conference_Titel
1981 Ultrasonics Symposium
Conference_Location
Chicago, IL, USA
Type
conf
DOI
10.1109/ULTSYM.1981.197739
Filename
1534679
Link To Document