• DocumentCode
    2449788
  • Title

    The leading edge of production wafer probe test technology

  • Author

    Mann, W.R. ; Taber, Frederick L. ; Seitzer, Philip W. ; Broz, Jerry J.

  • Author_Institution
    SWTW, Rockwell Int., Newport Beach, CA, USA
  • fYear
    2004
  • fDate
    26-28 Oct. 2004
  • Firstpage
    1168
  • Lastpage
    1195
  • Abstract
    Microelectronic wafer and die level testing have undergone significant changes in the past few years. This work´s first section describes today´s leading edge characteristics for numerous areas of this test technology including the minimum I/O pad pitch, advances in contactor technologies, maximum number of l/Os probed, maximum number of die tested in parallel, the largest prober and substrates, and the maximum frequencies being tested at the wafer level. The second section discuss the leading edge practices in three critical areas of wafer test: probe contactor cleaning, I/O pad damage minimization, and sorting good from bad die. The final section present the communication methods between the design and the probe test organizations and some state-of-the-art examples for I/O pad designs.
  • Keywords
    integrated circuit design; integrated circuit manufacture; integrated circuit testing; production testing; I/O pad damage minimization; I/O pad designs; communication methods; die level testing; leading edge characteristics; microelectronic wafer testing; minimum I/O pad pitch; probe contactor cleaning; production wafer probe test; wafer frequency testing; Automatic testing; Cleaning; Frequency; Lagrangian functions; Microelectronics; Needles; Probes; Production; Sorting; System testing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Test Conference, 2004. Proceedings. ITC 2004. International
  • Print_ISBN
    0-7803-8580-2
  • Type

    conf

  • DOI
    10.1109/TEST.2004.1387391
  • Filename
    1387391