DocumentCode
2449788
Title
The leading edge of production wafer probe test technology
Author
Mann, W.R. ; Taber, Frederick L. ; Seitzer, Philip W. ; Broz, Jerry J.
Author_Institution
SWTW, Rockwell Int., Newport Beach, CA, USA
fYear
2004
fDate
26-28 Oct. 2004
Firstpage
1168
Lastpage
1195
Abstract
Microelectronic wafer and die level testing have undergone significant changes in the past few years. This work´s first section describes today´s leading edge characteristics for numerous areas of this test technology including the minimum I/O pad pitch, advances in contactor technologies, maximum number of l/Os probed, maximum number of die tested in parallel, the largest prober and substrates, and the maximum frequencies being tested at the wafer level. The second section discuss the leading edge practices in three critical areas of wafer test: probe contactor cleaning, I/O pad damage minimization, and sorting good from bad die. The final section present the communication methods between the design and the probe test organizations and some state-of-the-art examples for I/O pad designs.
Keywords
integrated circuit design; integrated circuit manufacture; integrated circuit testing; production testing; I/O pad damage minimization; I/O pad designs; communication methods; die level testing; leading edge characteristics; microelectronic wafer testing; minimum I/O pad pitch; probe contactor cleaning; production wafer probe test; wafer frequency testing; Automatic testing; Cleaning; Frequency; Lagrangian functions; Microelectronics; Needles; Probes; Production; Sorting; System testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Test Conference, 2004. Proceedings. ITC 2004. International
Print_ISBN
0-7803-8580-2
Type
conf
DOI
10.1109/TEST.2004.1387391
Filename
1387391
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