Temperature Compensated High Coupling and High Quality Factor ZnO/SiO, Bulk Wave Resonators on High Resistance Substrates

Author

Shiosaki, T. ; Fukuichi, T. ; Tokuda, M. ; Kawabata, A.

fYear

1984

fDate

14-16 Nov. 1984

Firstpage

405

Lastpage

410

Keywords

Electrodes; Frequency; Gallium arsenide; Piezoelectric films; Q factor; Semiconductor films; Sputter etching; Substrates; Temperature; Zinc oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

IEEE 1984 Ultrasonics Symposium

Conference_Location

Dallas, Texas, USA

Type

DOI

10.1109/ULTSYM.1984.198328

Filename

1535268

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