DocumentCode
2458520
Title
Characterization of dynamics in on-wafer RF MEMS variable - capacitors using RF measurement techniques
Author
Girbau, David ; Lázaro, Antonio ; Pradell, Lluís
fYear
2004
fDate
38149
Firstpage
117
Lastpage
123
Keywords
Capacitors; Electrostatic measurements; Electrothermal effects; Frequency measurement; Measurement techniques; Micromechanical devices; Radio frequency; Radiofrequency microelectromechanical systems; Resonance; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
ARFTG Conference Digest Spring, 2004. 63rd
Print_ISBN
0-7803-8371-0
Type
conf
DOI
10.1109/ARFTG.2004.1387865
Filename
1387865
Link To Document