DocumentCode
2462843
Title
Pyroelectric Properties and Applications of Sputtered Zinc-Oxide Thin Films
Author
Polla, D.L. ; Muller, R.S. ; White, R.M.
fYear
1985
fDate
16-18 Oct. 1985
Firstpage
495
Lastpage
498
Keywords
Chemical sensors; Electrodes; Pyroelectricity; Sensor arrays; Sputtering; Surface acoustic waves; Temperature sensors; Thin film sensors; Voltage; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
IEEE 1985 Ultrasonics Symposium
Conference_Location
San Francisco, CA, USA
Type
conf
DOI
10.1109/ULTSYM.1985.198559
Filename
1535499
Link To Document