DocumentCode
2466783
Title
Multi-Layer ZnO Acoustic Transducers
Author
Hadimioglu, B. ; Khuri-Yakub, B.T. ; Goddard, L.C. ; Quate, C.F.
fYear
1986
fDate
17-19 Nov. 1986
Firstpage
361
Lastpage
364
Keywords
Acoustic transducers; Acoustic waves; Fabrication; Frequency conversion; Impedance; Piezoelectric films; Piezoelectric materials; Piezoelectric transducers; Sputtering; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
IEEE 1986 Ultrasonics Symposium
Conference_Location
Williamsburg, VA, USA
Type
conf
DOI
10.1109/ULTSYM.1986.198765
Filename
1535705
Link To Document