• DocumentCode
    2466783
  • Title

    Multi-Layer ZnO Acoustic Transducers

  • Author

    Hadimioglu, B. ; Khuri-Yakub, B.T. ; Goddard, L.C. ; Quate, C.F.

  • fYear
    1986
  • fDate
    17-19 Nov. 1986
  • Firstpage
    361
  • Lastpage
    364
  • Keywords
    Acoustic transducers; Acoustic waves; Fabrication; Frequency conversion; Impedance; Piezoelectric films; Piezoelectric materials; Piezoelectric transducers; Sputtering; Zinc oxide;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    IEEE 1986 Ultrasonics Symposium
  • Conference_Location
    Williamsburg, VA, USA
  • Type

    conf

  • DOI
    10.1109/ULTSYM.1986.198765
  • Filename
    1535705