DocumentCode
2470415
Title
Sputtering Dose Control of Ion Mill Processing
Author
Raschke, Curt ; Wilde, Patrick ; Hill, Cynthia
fYear
1987
fDate
14-16 Oct. 1987
Firstpage
193
Lastpage
196
Keywords
Computerized monitoring; Fabrication; Gratings; Ion beams; Milling machines; Optical films; Proportional control; Sputter etching; Sputtering; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
IEEE 1987 Ultrasonics Symposium
Conference_Location
Denver, Colorado, USA
Type
conf
DOI
10.1109/ULTSYM.1987.198952
Filename
1535892
Link To Document