DocumentCode
2470812
Title
Thin Film Induced Effects on SAW Devices
Author
Sinha, Bikash K. ; Locke, Stanley
fYear
1987
fDate
14-16 Oct. 1987
Firstpage
289
Lastpage
294
Keywords
Bonding; Fingers; Frequency estimation; Glass; Resonant frequency; Substrates; Surface acoustic wave devices; Thermal expansion; Thermal stresses; Thin film devices;
fLanguage
English
Publisher
ieee
Conference_Titel
IEEE 1987 Ultrasonics Symposium
Conference_Location
Denver, Colorado, USA
Type
conf
DOI
10.1109/ULTSYM.1987.198971
Filename
1535911
Link To Document