DocumentCode
2471073
Title
Quantitative Effects of Substrate Tilt, Curvature and Deposition Position on Orientation in ZnO Films
Author
Howell, D. ; Goddard, L. ; Khuri-Yakub, B.T.
fYear
1987
fDate
14-16 Oct. 1987
Firstpage
381
Lastpage
384
Keywords
Cathodes; Laboratories; Optical fiber devices; Optical films; Optical surface waves; Sputtering; Substrates; Transducers; X-ray diffraction; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
IEEE 1987 Ultrasonics Symposium
Conference_Location
Denver, Colorado, USA
Type
conf
DOI
10.1109/ULTSYM.1987.198987
Filename
1535927
Link To Document