Biochemical IC using micro stereolithography-towards artificial cellular device

Author

Ikuta, K.

Author_Institution

Dept. of Micro Syst. Eng., Nagoya Univ., Japan

fYear

2000

fDate

11-13 July 2000

Firstpage

26

Lastpage

27

Abstract

New types of micro fluidic device named "Biochemical IC Family" were developed and basic performances of each chip as well as overall ability of combined chips were verified experimentally. The original concept of the biochemical IC has been proposed by Ikuta. Each chemical IC chip in a disk shape (or cell shape) contains different functional devices such as multiple micro pumps, valves, micro concentrators and micro reactors etc. This chip is constructed by two kinds of materials. Upper part of the chip including micro fluid system is made of UV curable polymer because 3D micro fabrication is employed to make it. Bottom part of the chip is made of silicon circuit for electrical interaction among the chips. The biochemical IC introduces the strong point of today\´s IC/LSI family such as C-MOS/TTL chip-set.. Therefore, various kind of micro chemical apparatus can be assembled by the user.

Keywords

biomolecular electronics; biotechnology; lithography; microfluidics; UV curable polymer; artificial cellular device; biochemical IC; cell shape; disk shape; functional devices; micro fluidic device; micro stereolithography; Biological materials; Chemical reactors; Fabrication; Fluidic microsystems; Inductors; Microfluidics; Micropumps; Polymers; Shape; Valves;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 2000 International

Conference_Location

Tokyo, Japan

Print_ISBN

4-89114-004-6

Type

conf

DOI

10.1109/IMNC.2000.872605

Filename

872605