DocumentCode
2472771
Title
Effect of Higher Modes of a Layered Substrate on V(Z) in Acoustic Microscopy
Author
Chan, K.H. ; Bertoni, H.L. ; Davids, D.A.
fYear
1987
fDate
14-16 Oct. 1987
Firstpage
795
Lastpage
800
Keywords
Acoustic measurements; Acoustic propagation; Acoustic waves; Attenuation; Mechanical factors; Optical microscopy; Phase estimation; Reflection; Substrates; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
IEEE 1987 Ultrasonics Symposium
Conference_Location
Denver, Colorado, USA
Type
conf
DOI
10.1109/ULTSYM.1987.199068
Filename
1536008
Link To Document